The ORION PLUS helium ion microscope

By focusing helium ions into a beam, instead of electrons, the microscope can offer higher focus with lower sample damage.

Article Summary

Carl Zeiss SMT has introduced an improved version of its helium ion microscope at the Microscopy and Microanalysis 2008 exhibition: the ORION PLUS. By focusing helium ions into a beam, instead of electrons, the microscope can offer higher focus with lower sample damage.

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