Top view of the Micronium chip, which sports six tiny mass-spring systems. The colors are caused by an optical effect: the rectangle representing the mass has tiny holes in it, causing reflection of light.
A wafer with a number of chips on it, each chip contains six tiny mass-spring systems and each system produces a different tone
Johan Engelen with the full Micronium setup
Four chips are placed in a vacuum container and the tones produced are sent to be amplified thousands of times
Another lighting effect from the top of the Micronium chip
Two mounted chips with all connections
A Scanning Electron Microscope Image of one single mass-spring system, where the springs, the mass and the moving parts/comb drives can be clearly seen - note the scale