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Chemical-etching technique could lead to diamond micro-machines


September 29, 2011

One of the diamond cavities carved by the NIST team

One of the diamond cavities carved by the NIST team

With sizes typically measured in micrometers, Micro-electromechanical systems (MEMS) devices are already being used in applications such as super-accurate sensors, energy-harvesting devices, and electronic signal amplifiers. Given how difficult it would be to replace such systems' moving parts as they wear out, it would be ideal if those parts could be made from as hard a material as possible. Well, while most MEMS are presently made chiefly of silicon, researchers from the National Institute of Standards and Technology (NIST) are now on their way to making them from diamonds.

While diamond is one of the hardest substances in the world, it so far hasn't been possible to carve at the nanoscale. The NIST team, however, has succeeded in doing so, using a chemical etching technique.

The process involves taking advantage of the cubic shape of the diamond crystal, much as jewelers do when cutting gemstones. Different planes running through the diamond are used as boundaries, to precisely stop the etching where desired. So far, the researchers have succeeded in making smooth-walled, smooth-bottomed cavities ranging from 1 to 72 micrometers across, within diamond samples.

The NIST researchers now plan on learning how to better control the process, and creating a prototype diamond MEMS device.

About the Author
Ben Coxworth An experienced freelance writer, videographer and television producer, Ben's interest in all forms of innovation is particularly fanatical when it comes to human-powered transportation, film-making gear, environmentally-friendly technologies and anything that's designed to go underwater. He lives in Edmonton, Alberta, where he spends a lot of time going over the handlebars of his mountain bike, hanging out in off-leash parks, and wishing the Pacific Ocean wasn't so far away. All articles by Ben Coxworth

Nothing new here we have been SHIPPING Diamond MEMS for 13 years. Thanks though for pointing us to a new licensee.


Talking about breaking down diamonds, do you have any ideas on how to put them back together again?

Gal Harat
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